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P201: Substrate, Epitaxy and Growth Equipment-SSL&IFWS

SSL&IFWS Series Conference


Silicon Carbide (SiC) and Gallium Nitride (GaN) are probably the most popular Wide band-gap semiconductor materials whose importance cannot be overestimated in the power devices for high frequency applications and the quality of the material directly determines the performance of the device.  The themes of this section cover the materials for substrate, homo/heteroepitaxial growth, characterization and associated equipment which ultimately lead to the discussion from mechanism to industrial production. World leading scientists have been invited to this conference who will demonstrate their most recent development in specified areas.


Session Chairs

SHEN Bo——Deputy Director and Professor of School of Physics, Peking University

XU Xiangang——Professor of Shandong University

Session Members

XU Ke——Director of Nano-characterization Lab in Suzhou Institute of Nano-tech and Nano-bionics, Chinese Academy of Sciences; President of Suzhou Nanowin Co. Ltd.

LI Dabing——Professor of Changchun Institute of Optics, Fine Mechanics and Physics, CAS

BI Wengang——Professor at Hebei University of Technology

WANG Zhiyue——CTO of CETC Electronics Equipment Group Co., Ltd.

DU Zhiyou——Senior Vice President of Advanced Micro-Fabrication Equipment Inc

WU Jun——Vice President & Chief Scientist of NAURA Technology Group Co., Ltd.

YANG Min——CTO of Jiangsu Nata Opto-electronic Material Co., Ltd.

P201:衬底、外延及生长装备 / The Technology in Substrate, Epitaxy and Wafer Growth Equipment

时间:20201125日上午08:30-12:05

地点:深圳会展中心•五层玫瑰厅2

Time: Nov 25th, 2020 Morning 08:30-12:00

Location: Shenzhen Convention and Exhibition Center • 5th Floor Rose Hall2

主持人

Moderator

沈波/ SHEN Bo

北京大学物理学院教授, 理学部副主任/Professor & Deputy Director, Division of Sciences, Peking University

徐现刚/XU Xiangang

山东大学教授,晶体材料国家重点实验室副主任/Professor & Deputy Director of State Key Laboratory of Crystal Material of Shandong University

9:00-9:25

Prediction system of CFD simulation in solution growth constructed by machine learning- Application for SiC top-seeded solution growth

宇治原徹--日本名古屋大学教授

 Toru Ujihara--Professor of Nagoya University, Japan

9:25-9:45

Quantified characterisation of active defects in 4H-SiC MOS devices

4H-SiC MOS器件中活性缺陷的量化表征

Jisheng HAN--澳大利亚格里菲斯大学昆士兰微纳米技术中心研究员

Jisheng HAN--Research Fellow of Queensland Micro and Nanotechnology Centre, Griffith University, Australia

9:45-10:05

SiC单晶材料及产业化进展

progress in research and industrialization of sic single crystal material

彭 燕--广州南砂晶圆半导体技术有限公司研发中心主任、山东大学副教授

PENG Yan--Associate Professor of Shandong University, R&D Director of Guangzhou Summit Crystal Semiconductor Co., Ltd

10:05-10:20

通过二次注入及激活退火来提高室温Al离子注入SiC的临界剂量Enhancing the room temperature Al implantation dose by second implantation and activation annealing

  --中国科学院苏州纳米技术与纳米仿生研究所副研究员

ZHANG Xuan--Assocaite Professor of  SINANO, Chinese Academy of Sciences

10:20-10:35

茶歇/Coffee Break

10:35-10:55

High optical efficiency catalyst-free GaN nanowires grown on a wide range of substrates via in-situ dislocation-free polycrystalline GaN layer

Iman S. ROQAN--沙特阿拉伯阿卜杜拉国王科技大学副教授

Iman S. ROQAN--Assistant Professor of King Abdullah University of Science and Technology (KAUST), Saudi Arabia

10:55-11:15

AMEC new progress on MOCVD Development for Green and Blue Mini-LED Applications

郭世平--中微半导体设备(上海)股份有限公司副总裁兼MOCVD产品事业部总经理

Shiping GUO--VP & GM of MOCVD Product & Business Group, Advanced Micro-Fabrication Equipment Inc. China

11:15-11:35

硅基氮化镓厚膜外延技术及碳杂质相关缺陷物理研究

Technology of growing thick GaN layers on Si substrates and physics of carbon impurity in GaN

杨学林--北京大学物理学院高级工程师

YANG Xuelin--SeniorEngineerof School of Physics,Peking University

11:35-11:55

新型液态MO源助力中国第三代半导体New Liquid MO Sources Prompt the Development of Wide Bandgap Semiconductor in China

杨敏--江苏南大光电材料股份有限公司首席技术官(副总裁)

YANG Min--CTO (VP) of Jiangsu Nata Opto-Electronic Material Co., Ltd

11:55-12:15

大面积MoS2-on-GaN范德华异质结的光子器件应用

Large Scale MoS2-on-GaN Van der Waals heterostructure for photonic device application

刘新科--深圳大学副教授

LIU Xinke--Assistant Professor of Shenzhen University